Piezo stage is `world`s smallest`

The German nanotechnology specialist, Physik Instrumente (PI), claims to have developed the world`s smallest closed-loop translation stage. The M-663 stage, smaller than a 9V battery, is intended for applications such as micromachining, scanning, and semiconductor testing.

The stage, which is driven by a linear piezo motor, has a travel range of 20mm, a resolution of 0.1µm, a maximum velocity of 600mm/s, and an acceleration of 200mm/s². The linear drive is based on a novel ultrasonic, piezoceramic actuator, which uses energy from longitudinal waves for propulsion (see diagram below). When the actuator is excited, the friction tips follow an elliptical trajectory, transmitting pushing forces to a bar on the moving section.

One attraction of the piezo technology is that it is does not create electromagnetic interference - and is not affected by external sources of EMI. It can be controlled by almost any PID servo controller.

A non-contact 0.1µm linear encoder is built into the stage. Open-loop and XY versions of the stage are available.

PI`s UK distributor is Lambda Photometrics.